HIWIN LOGO
Technical Support

MultiDimensional-ZT

Feature

MultiDimensional positioning stage “MD-ZT” integrates 5 DOFs including Z, Rx, Ry, Rz and Lift-Z. MD-ZT successfully minimize the extra load and height when installed on XY platforms.

Height
90 mm
Nano-level repeatability
±30 nm
Nano positioning stability
±3 nm
Application
Semiconductor metrologySurface metrology
Technical Support